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Concurrent trends in the semiconductor industry toward
increasingly complex film stacks, ever-thinner layers, the need
for better process control and the desire to manufacture in smaller
lot sizes are putting pressure on legacy wafer-handling equipment
to meet today's nano-manufacturing requirements.
BlueShift™ Technologies offers a new approach
to semiconductor manufacturing-replacing legacy vacuum cluster-tool
designs first introduced in the 1980s. |
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Enter QuickLink™: Technical Advantages
The QuickLink wafer-handling system from BlueShift Technologies
consists of hardware and software modules that provide significant
technical advantages over current market offerings:
- Flexibility to support any number of process chambers
- Better particle performance
- Higher throughput
- Increased reliability
- Better process isolation
- Mix and match different process types
- Automatic wafer position correction
- Automatic software configuration
- Ability to handle small-lot sizes
- Support for integrated metrology
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With its linkable architecture and next-generation
features, the QuickLink will become the foundation for future process
equipment by providing OEMs with a compact, simple automation platform
that they can deliver more rapidly and at a substantially lower
cost than before.
Financial Advantages
The QuickLink system-by means of its unique linkable and adaptable architecture-can provide measurable business advantages to OEMs and fabs-compared to today's wafer-handling technologies: |
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- 10%+ lower installation cost
- Up to 50% increase in factory productivity
- 30% reduction in vacuum-handling costs
- Reduction in equipment footprint-resulting in 40-50% better
space utilization
Learn more about
the QuickLink wafer-handling system...
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